A Novel Love Wave Mode Sensor Waveguide Layer with Microphononic Crystals

Surface acoustic wave (SAW) sensors have been applied in various areas with many advantages, such as their small size, high sensitivity and wireless passive form. Love mode sensors, an important kind of SAW sensor, are mostly used biology chemistry monitoring, they can be a liquid environment. Common consist delay line waveguide sensitive layers. To extend the application this article reports novel sensor consisting layer microphononic crystals (PnCs). analyze properties new structure, band structure was calculated, transmission obtained by introducing structures quasi-three-dimensional models. Furthermore, devices traditional were fabricated. The results show that, designed microstructure phononic layer, attenuation barely increased, frequency shifted amount. In environmental experiments, micro PnCs shows even better character than one. Moreover, introduced extended to microreaction tanks for microcontrol. Therefore, is promising combining microfluidics.